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Photopolymerization and Metalization for Fabricating Functional Devices and Metamaterials

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Abstract

Two-photon-induced photopolymerization is useful for fabricating 3D micro/nano-structures with the resolution of the sub-diffraction limit. By using this method, photonic crystal was created with pre-compensation of shrinkage of photopolymer. On the contrary, the shrinkage was utilized to reduce the structure size. A micro-lens array was used to produce a mass of structures in parallel. Furthermore, metallization of the 3D polymer templates was conducted by electroless metal plating. These fabrication techniques are applicable to functional micro/nano devices.

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Authors and Affiliations

  1. Nanophotonics Lab., RIKEN, 2-1 Hirosawa, 351-0198, Wako, Saitama, Japan

    Satoshi Kawata, Takuo Tanaka & Nobuyuki Takeyasu

  2. Applied Physics, Osaka University, Yamadaoka 2-1, 565-0871, Suita, Osaka, Japan

    Sana Nakanishi

Authors
  1. Satoshi Kawata
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  2. Takuo Tanaka
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  3. Nobuyuki Takeyasu
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  4. Sana Nakanishi
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Kawata, S., Tanaka, T., Takeyasu, N. et al. Photopolymerization and Metalization for Fabricating Functional Devices and Metamaterials. MRS Online Proceedings Library 921, 201 (2006). https://doi.org/10.1557/PROC-0921-T02-01

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  • DOI: https://doi.org/10.1557/PROC-0921-T02-01

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