Abstract
We present a novel nanotube-on-insulator (NOI) approach to produce high-yield nanotube devices based on aligned single-walled carbon nanotubes. First, we managed to grow aligned nanotube arrays with controlled density on crystalline, insulating sapphire substrates, which bear analogy to industry-adopted silicon-on-insulator substrates. Based on the nanotube arrays, we demonstrated registration-free fabrication of both top-gated and polymer-electrolyte-gated field-effect transistors with minimized parasitic capacitance. In addition, we have successfully developed a way to transfer these aligned nanotube arrays to flexible substrates. Our approach has great potential for high-density, large-scale integrated systems based on carbon nanotubes for both micro- and flexible electronics.
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References
S. Iijima ; T. Ichihashi Nature 1993, 363, 603–605.
M. S. Dresselhaus ; G. Dresselhaus ; Ph. Avouris Carbon Nanotubes: Synthesis, Structure, Properties and Applications; Springer: 2001.
S. J. Tans ; A. R. M. Verschueren ; C. Dekker Nature(London) 1998, 393, 49–52.
J. Appenzeller ; J. Knoch ; V. Derycke ; R. Martel ; S. Wind ; Ph. Avouris Phys. Rev. Lett. 2002, 89, 126801.
A. Javey ; H. Kim ; M. Brink ; Q. Wang ; A. Ural ; J. Guo ; P. McIntyre ; P. McEuen ; M. Lundstrom ; H. Dai Nat. Mater. 2002, 1, 241–246.
S. Rosenblatt ; Y. Yaish ; J. Park ; J. Gore ; V. Sazonova ; and P. L. McEuen Nano Lett. 2002, 2, 869–872.
A. Javey ; J. Guo ; Q. Wang ; M. Lundstrom ; H. J. Dai Nature(London) 2003, 424, 654–657.
S. J. Wind ; J. Appenzeller ; Ph. Avouris Phys. Rev. Lett. 2003, 91, 58301.
J. Kong ; H. T. Soh ; A. M. Cassell ; C. F. Quate ; H. J. Dai Nature 1998, 395, 878–881.
H. Song ; X. Liu ; C. J. Zhou Am. Chem. Soc. 2005, 127, 5294–5295.
G. G. Shahidi IBM J. Res. & Dev. 2002, 46, 121–131.
A. Javey ; Q. Wang ; A. Ural ; Y. Li ; H. Dai Nano Lett. 2002, 2, 929–932.
P. C. Collins ; Arnold ; M. S., Avouris P Science, 2001, 292, 706–709.
C. Lu ; Q. Fu ; S. Huang ; J. Liu Nano Lett. 2004, 4, 623–627.
C. Kocabas ; M. A. Meitl ; A. Gaur ; M. Shim ; J. A. Rogers Nano Lett. 2004, 4, 2421–2426.
K. Bradley ; J.-P. P. Gabriel ; G Grüner Nano Lett. 2003, 3, 1353–1355.
Y Li ; W. Kim ; Y. Zhang ; M. Rolandi ; D. Wang ; H. J. Dai Phys. Chem. B 2001, 105, 11424–11431.
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Liu, X., Han, S., Zhang, D. et al. A Novel Nanotube-on-Insulator (NOI) Approach toward Single-Walled Carbon Nanotube Devices. MRS Online Proceedings Library 938, 710 (2006). https://doi.org/10.1557/PROC-0938-N07-10
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DOI: https://doi.org/10.1557/PROC-0938-N07-10