Abstract
The intensity profiles of various kinds of topheaters are compared and discussed. Using the mercury-arc lamp heater experiments on polycrystalline silicon layers of thicknesses varying from 1 to 10 urn were performed. The 10 fiva layers were polished prior to recrystallization. After zone melting recrystallization they showed a strong (100) texture combined with an alignment of the [010] direction with the scan direction. By patterning 1 ¼m poly-silicon films into isolated narrow silicon stripes, the kinetic mechanism that is shown to be responsible for the alignment of the [010] direction along the scan direction could be inhibited. In this way other mechanisms that influence the orientation could be studied. Finally some electrical characteristics are presented.
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References
J.M. Gibson, L.N. Pfeiffer, K.W. West and D.C. Joy, in Seimiconductor-on-Insulator Thin Film Transistor Technology, edited by A. Chiang, M.W. Geis and L. Pfeiffer (Mater. Res. Soc. Symp. Proc. 53, Pittsburgh, 1986) p. 289.
L. Pfeiffer, A.E. German, K.A. Jackson and K.W. West in Beam-Solid Interactions and Transient Processes edited by M.O. Thompson, S.T. Picraux and J.S. Williams (Mater. Res. Soc. Symp. Proc. 74, Pittsburgh, 1987) p. 543.
P.W. Mertens, D.J. Wouters and H.E. Maes accepted for publication in J. Appl. Phys.
W. Elenbaas Light Sources (MacMillan, London, 1972) p. 134.
C.K. Chen, M.W. Geis, B-Y. Tsaur, R.L. Champan and J.C.C. Fan J. Electrochem. Soc. 131, 1707 (1984).
C.P. Grigoropoulos, R.H. Buckholz and G.A. Domoto J. Appl. Phys. 59, 454 (1986).
C.I. Drowley, P. Zorabedian and T.I. Kamins in Energy Beam-Solid Interactions and Transient Thermal Processing edited by J.C.C. Fan and N.M. Johnson (Mat. Res. Soc. Symp. Proc. 23, Elsevier, New York 1984) p. 465.
K. Sugahara, S. Kusunoki, Y. Inoue, T. Nishimura and Y. Akasaka in Ext. Abstrs. 18th Conf. on Solid State Dev. and Mat., Tokyo (1986) p. 565.
M.W. Geis, H.I. Smith, B-Y. Tsaur, J.C.C. Fan, D.J. Silversmith and R.W. Mountain, J. Electrochem. Soc. 129, 2812 (1982).
L.N. Pfeiffer, S. Paine, G.H. Gilmer, W. van Saarloos and K.W. West, Phys. Rev. Lett. 54, 1944 (1985).
L. Pfeiffer, G.K. Celler, T. Kovacs and McD. Robinson, App. Phys. Lett. 43, 1048 (1983).
K.J. Yallup, P.W. Mertens, L. Dupas, K. De Meyer and H.E. Maes to be presented at the 1988 European Silicon On Insulator Workshop, Meylan France.
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Mertens, P.W., Wouters, D.J., Yallup, K.J. et al. Evaluation of Lamp Zone-Melting Recrystallization. MRS Online Proceedings Library 107, 221–224 (1987). https://doi.org/10.1557/PROC-107-221
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DOI: https://doi.org/10.1557/PROC-107-221