Skip to main content
SpringerLink
Log in

Fabricaton Of Granular Materials by High-Pressure Sputtering

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

A brief study of the fabrication of granular materials by high-pressure sputtering is presented. This method utilizes sputtering at high pressures (p > 100 mTorr) in a thermal gradient to produce nanoscale particles, which are then embedded in a matrix by normal sputtering (p ∼ a few mTorr). The shape, size and the degree of aggregation of these nanoscale crystals can be changed by varying such processing parameters as the sputtering gas pressure and the target voltage. Examples are presented of nanocomposite films containing Mo nanocrystals (grain size ranging from 3 to 20 nm ) in an Al matrix.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G.M. Chow, R.L. Holtz, A. Pattnaik, A.S. Edelstein, T.E. Schlesinger and R.C. Cammarata, Appl. Phys. Lett. 56, 1853 (1990).

    Article  CAS  Google Scholar 

  2. S.H. Liou, C.H. Chen, H.S. Chen, A.R. Kortan, and C.L. Chien, Mat. Res. Soc. Symp. Proc. 132, 191 (1989).

    Article  Google Scholar 

  3. A.S. Edelstein, B.N. Das, R. L. Holtz, N. C. Koon, M. Rubinstein, S.A. Wolf, and K.E. Kihlstrom, J. Appl. Phys. 61, 3320 (1987).

    Article  CAS  Google Scholar 

  4. John. A Thornton, and D.W. Hoffman, Thin Solid Films, 171, 5 (1989).

    Article  Google Scholar 

  5. G.M. Chow, C.L. Chien, and A.S. Edelstein, submitted to Appl. Phys. Lett.

Download references

Author information

Authors and Affiliations

  1. Naval Research Laboratory, Washington, D.C., 20375, USA

    G. M. Chow, R. L. Holtz & A. S. Edelstein

  2. Department of Physics and Astronomy, Johns Hopkins University, Baltimore, MD, 21218, USA

    C. L. Chien

  3. Research Associate of National Research Council, National Academy of Sciences, USA

    G. M. Chow

  4. SFA, Inc., Landover, MD, 20785, USA

    R. L. Holtz

Authors
  1. G. M. Chow
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. R. L. Holtz
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C. L. Chien
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. S. Edelstein
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Chow, G.M., Holtz, R.L., Chien, C.L. et al. Fabricaton Of Granular Materials by High-Pressure Sputtering. MRS Online Proceedings Library 195, 623–626 (1990). https://doi.org/10.1557/PROC-195-623

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-195-623

Search

Navigation