Abstract
Plastic deformation of several covalently-bound materials has been studied during ion irradiation. In all of these materials, namely crystalline and amorphous silicon, crystalline and amorphous Si0.9Ge0.1, and amorphous SiO2, the damage created by the ion beam causes density changes in the irradiated region which eventually saturate with ion dose. In the crystalline materials, the density changes were accompanied by a transformation to the amorphous phase. Superimposed on the density changes is plastic deformation which occurs during irradiation of both crystalline and amorphous materials to relieve stresses in the irradiated region. A wafer curvature measurement technique has been developed which allows the contributions from density changes and plastic deformation to be distinguished and the stress dependence of the plastic deformation to be determined.
In all of the amorphous materials, the plastic deformation is Newtonian viscous shear flow, which is characteristic of solids where deformation is governed by the diffusive motion of point defects. The radiation-enhanced shear viscosity per ion was flux-independent, revealing that flow occurs rapidly, probably within the localized damaged regions created by each ion. This viscosity does not depend strongly on the material. In fact, similar viscosities were obtained during measurements of radiation-enhanced plastic deformation of crystalline covalent samples and polycrystalline aluminum films.
Similar content being viewed by others
References
C. A. Volkert, J. Appl. Phys. 70, 3521 (1991).
C. A. Volkert and A. Polman, submitted to Appl. Phys. Lett.
S. Klaumünzer, C. Li, S. Löffler, M. Rammensee, G. Schumacher, and H. Ch. Neitzert, Rad. Eff. 108, 131 (1989).
A. Audouard, E. Balanzat, J. C. Jousset, G. Fuchs, D. Lesueur, and L. Thome, Nucl. Inst. Meth. B 39, 18 (1989).
H. J. Lee, C. H. Henry, K. J. Orlowsky, R. F. Kazarinov, and T. Y. Kometani, Appl. Optics 27, 4104 (1988).
G. G. Stoney, Proc. Roy. Soc. London A 82, 172 (1909).
W. A. Brantley, J. Appl. Phys. 44, 534 (1973).
P. J. Burnett and G. A. D. Bnggs, J. Mater. Sci. 21, 1828 (1986).
R. Bhadra, J. Pearson, P. Okamoto, L. Rehn, and M. Grimsditch, Phys. Rev. B 38, 12656 (1988).
D. B. Fraser, J. Appl. Phys. 39, 5868 (1968).
C. A. Volkert, E. A. Fitzgerald, R. Hull, Y. H. Xie, and Y. J. Mii, J. Elect. Mat. 20, 833 (1991).
In calculating the stress in the “set” samples which are no longer in a spherical stress state, a modification of equation (1) must be used, which is described in reference [1].
C. A. Volkert, in Beam-Solid Interactions: Physical Phenomena, MRS Symposia Proceedings, edited by J. A. Knapp, P. Borgesen, and R. A. Zuhr (Materials Research Society, Pittsbugh PA, 1990}), p. 6
C. A. Volkert, to be submitted to Appl. Phys. Lett.
J. A. Roth, G. L. Olson, D. C. Jacobson, and J. M. Poate, Appl. Phys. Lett. 57, 1340 (1990).
A. Witvrouw and F. Spaepen, in Kinetics of Phase Transformations, MRS Symposia Proceedings, edited by M. O. Thompson, M. J. Aziz, and G. B. Stephenson, (Materials Research Society, Pittsbugh PA), in pres
S. Roorda, W. C. Sinke, J. M. Poate, D. C. Jacobson, S. Dierker, B. S. Dennis, D. J. Eaglesham, F. Spaepen, and P. Fuoss, Phys. Rev.B 44, 3702 (1991).
G. L. Olson and J. A. Roth, Mat. Sci. Rep. 3, 1 (1988).
J. P. Biersack and L. G. Haggmark, NucL Inst. Meth. B 174, 257 (1980).
A. P. Webb and P. D. Townsend, J. Phys. D 9, 1343 (1976).
J. Heibei and E. Voges, Phys. Stat. Sol. B 57, 609 (1980).
W. Primak, The Compacted States of Vitreous Silica, (Gordon and Breach, New York, 1975).
P. A. Flynn, D. S. Gardner, and W. D. Nix, IEEE Trans. Elect. Dev. ED-34, 689 (1987).
V. V. Penkovskii, Effect of Radiation on Metals (Elsevier Publishing Company, Amsterdam, 1964).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Volkert, C.A., Polman, A. Radiation-Enhanced Plastic Flow of Covalent Materials During Ion Irradiation. MRS Online Proceedings Library 235, 3–14 (1991). https://doi.org/10.1557/PROC-235-3
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-235-3