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Preparation of Powders and thin Films of Complex Oxides From Metal Alkoxides

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Preparation of complex oxides in the form of powders and thin films from metal alkoxides is discussed. Most attention is paid to ferroelectric and related materials - complex titanates and zirconates. Techniques for preparation of high-purity morphologically homogeneous powders Ti2, ZrO2 barium titanate and BaTiO3-based solid solutions, MgTiO3, Bi2WO6, Bi2MoO6 are proposed and discussed wilh respect to their application in ceramics technology. The solutions prepared electrochemically in methoxyethanol were widely used for formation of thin films, e.g. Y2O3-stabilized ZrO2 and PZT solid solutions on Pt-coated silicon substrates.

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Yanovskaya, M.I., Kotova, N.M., Obvintseva, I.E. et al. Preparation of Powders and thin Films of Complex Oxides From Metal Alkoxides. MRS Online Proceedings Library 346, 15–20 (1994). https://doi.org/10.1557/PROC-346-15

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