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Laser Irradiation of Ge(100): An Assessment of Surface Order with He Diffraction

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Abstract

We investigate the effects of Nd:YAG and excimer laser irradiation on the Ge(100) surface under UHV conditions over a temperature range 140 < T(K) < 300 using the surface sensitive probe of He atom diffraction. We study the effects of irradiation on surface damage and order using the apparent (2×1) → c(2×4) transition. We monitor surface contamination in situ. The temporal thermal response is modeled theoretically to aid in assessing the experimental results. The capability to maintain a Ge(100) surface at low temperatures free of contamination and well ordered is demonstrated.

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Authors and Affiliations

  1. AT&T Bell Laboratories, 600 Mountain Avenue, Murray Hill, New Jersey, 07974, USA

    W. R. Lambert, P. L. Trevor, M. T. Schulberg, M. J. Cardillo & J. C. Tully

Authors
  1. W. R. Lambert
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  2. P. L. Trevor
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  3. M. T. Schulberg
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  4. M. J. Cardillo
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  5. J. C. Tully
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Lambert, W.R., Trevor, P.L., Schulberg, M.T. et al. Laser Irradiation of Ge(100): An Assessment of Surface Order with He Diffraction. MRS Online Proceedings Library 35, 205–210 (1984). https://doi.org/10.1557/PROC-35-205

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  • DOI: https://doi.org/10.1557/PROC-35-205

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