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Applications of the Xia Scanning Photoemission Spectromicroscope for Element Identification on Material Surfaces

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The Second Generation Scanning Photoemission Microscope at the beamline X1A of the National Synchrotron Light Source (NSLS), X1A SPEM II, is designed for spatially resolved elemental and chemical analysis by X-ray Photoelectron Spectroscopy (XPS) on material surfaces. Based on Fresnel Zone Plate (ZP) microfocusing techniques with the use of a bright and coherent photon source, this microscope is capable of acquiring XPS spectra from a small area irradiated by the focused beam and taking element-specific (using photopeaks) or chemical-state-specific (by detecting the chemical core level shifts) images with a spatial resolution defined by the focused spot size.

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Ko, CH., Kirz, J., Ade, H. et al. Applications of the Xia Scanning Photoemission Spectromicroscope for Element Identification on Material Surfaces. MRS Online Proceedings Library 375, 303–305 (1994). https://doi.org/10.1557/PROC-375-303

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  • DOI: https://doi.org/10.1557/PROC-375-303

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