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Optical Waveguiding (Pb, La)(Zr,Ti)O3 Thin Films Prepared by Pulsed Laser Deposition

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Abstract

The ferroelectric (Pb, La) (Zr,Ti)O3 (PLZT(9.4/65/35)) optical waveguiding thin films have been prepared on SiO2 coated Si and on silica glass substrates by pulsed laser deposition. X-ray θ–2θ scans revealed that the films are single-phase pseudo-cubic perovskite. The surface chemical composition of the as grown films were determined by XPS. The ferroelectric properties of the films as grown on Pt/Ti coated silicon were demonstrated by using a modified Sawyer-Tower circuit, and the optical waveguiding properties of the films were characterized by using a rutile prism coupling method. The as grown films have an average transmittance of 80% in the wavelength range of 400≈2000nm and a refractive index of 2.2 at 632.8mn close to the bulk PLZT. The distinct m-lines of the guided TM and TE modes of the films as grown on SiO2 coated Si substrates have been observed.

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Authors and Affiliations

  1. National Laboratory of Solid State Microstructures, Nanjing University, Nanjing, 210093, China

    S. B. Xiong, Z. G. Liu, X. Y. Chen, X. L. Guo, T. Yu, S. N. Zhu & X. Liu

  2. Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai, 200050, China

    W. G. Luo

Authors
  1. S. B. Xiong
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  2. Z. G. Liu
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  3. X. Y. Chen
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  4. X. L. Guo
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  5. T. Yu
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  6. S. N. Zhu
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  7. X. Liu
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  8. W. G. Luo
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Xiong, S.B., Liu, Z.G., Chen, X.Y. et al. Optical Waveguiding (Pb, La)(Zr,Ti)O3 Thin Films Prepared by Pulsed Laser Deposition. MRS Online Proceedings Library 444, 149–154 (1996). https://doi.org/10.1557/PROC-444-149

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  • DOI: https://doi.org/10.1557/PROC-444-149

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