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Automatic Iterative Fitting of RBS Spectra from Multielement Samples

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Abstract

A computer code (BASF) has been constructed to perform automatic iterative fitting of smoothed Rutherford Backscattering Spectra using only the experimental spectrum and the parameter set defining the experiment. The code may be used to analyze anywhere from two to five elements. The code output consists of the total amount of each element present and a composition versus depth profile.

The code’s performance was verified experimental backscattering spectra. Samples consisting of nickel substrates onto which layers of nickel and aluminum have been alternately evaporated were used to produce backscattering spectra. These spectra, when analyzed, demonstrated that the code was able to determine the total aluminum content to within 5% and the ratio of aluminum to nickel within 1% of the thickness monitor readings taken during evaporation. The code has also shown the ability to recognize sharp interfaces in well resolved spectra. The ultimate limits on the code’s accuracy are the resolution of the spectrum and the accuracy of the computed stopping powers.

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References

  1. Mark Schalit and Robert Averback, Argonne National Laboratory, Unpublished (1980).

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  4. Wei-Kan Chu, James Mayer and Marc-A. Nicolet, Backscattering Spectrometry (Academic, New York, 1981) p. 364.

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Acknowledgements

The authors would like to thank the Materials Science and Technology Division at Argonne National Laboratory for the use of their facilities in carrying out this work. In particular, the help of Lynn Rehn, Pete Baldo, Bernie Kestel, and Loren Thompson is greatly appreciated. This work was supported by NSF Grant DMR 8310032.

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Authors and Affiliations

  1. Department of Nuclear Engineering, University of Michigan, Ann Arbor, Michigan, 48109

    James Eridon & Gary Was

Authors
  1. James Eridon
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  2. Gary Was
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Eridon, J., Was, G. Automatic Iterative Fitting of RBS Spectra from Multielement Samples. MRS Online Proceedings Library 54, 693–698 (1985). https://doi.org/10.1557/PROC-54-693

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  • DOI: https://doi.org/10.1557/PROC-54-693

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