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Sol-Gel Growth of High-Quality Pb(Zr, Ti)O3 Films on RUO2 Using Seed Layers

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Abstract

New approaches for improving fatigue performance of sol-gel PZT based ferroelectric capacitors with RuO2 electrodes are discussed. The use of thin (∼5 nm) high-Ti PZT seed layer was found to be effective for improving fatigue performance. For an optimized seedlayer thickness, FECAPs with excellent fatigue characteristics (less than 10% decrease in Pr after 1011 cycles) were obtained.

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Authors and Affiliations

  1. IMEC vzw, Kapeldreef 75, Leuven, Belgium

    G. J. Norga, Laura Fè, D. J. Wouters, A. Bartic & H. E. Maes

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  1. G. J. Norga
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  2. Laura Fè
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  3. D. J. Wouters
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  4. A. Bartic
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  5. H. E. Maes
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Norga, G.J., Fè, L., Wouters, D.J. et al. Sol-Gel Growth of High-Quality Pb(Zr, Ti)O3 Films on RUO2 Using Seed Layers. MRS Online Proceedings Library 541, 307–312 (1998). https://doi.org/10.1557/PROC-541-307

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  • DOI: https://doi.org/10.1557/PROC-541-307

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