Abstract
Modified sol-gel processes have been developed for the preparation of precursor solutions of undoped, La and Ta doped PZT (25/75). These processes use different solvents (methoxyethanol, butoxyethanol) and different lead sources (lead acetate, lead oxide). Due to variations in the structure and in the composition of the solutions, significantly different thermal decomposition behaviors were found. These inevitably affected texture and microstructure of the sol-gel derived thin films, demonstrating the important role of precursor chemistry in the improvement of film properties. In the case of tantalum doped Pt/PZT/Pt ferroelectric capacitors a rectangular hysteresis loop, featuring high Pr, was obtained for one specific precursor chemistry.
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References
B. Jaffe, W. Cook and H. Jaffe, “Piezoelelectric Ceramics”, Academic Press, New York (1971).
R. L. Pleffer and W. D. Wilber, MRS. Symp. Proc. 361, 117 (1995).
R. Waser and D. M. Smyth in “Ferroelectric thin films: synthesis and basic properties” edited by C. P. Araujo, J. F. Scott and G. W. Taylor, Gordon and Breach Publishers (1996).
S. B. Desu, Phys. Stat. Sol. (a) 151, 467 (1995).
“Dopant and microstructure effects on switching properties of PZT thin films”, R. Klissourska Brooks, PhD thesis N’ 1805, Ecole Polytechnique Federale de Lausanne, Switzerland (1998).
W. I. Lee and J. K. Lee, Material Research Bulletin 30, 10, 1185 (1995).
M. J. Peng, S. E. Park, K. A. Markowski, S. Yoshikawa and C. A. Randall, J. Am. Ceram. Soc. 79, 2971 (1996).
D. Dimos, W. L. Warren and H. N. Al-Shareef in “Thin film ferroelctric materials and device” edited by R. Ramesh, Kluwer Academic Publishers (1997).
J-F. Chang and S. B. Desu, J. Mater. Res. 9, 4 (1994).
R. Klissurska, K. G. Brooks, I. M. Reaney, C. Pawlaczyk, M. Kosec and N. Setter, J. Am. Ceram. Soc. 78, 6, 1513 (1995).
A. I. Kingon, S. K. Streiffer, S.-H. Kim and D. Thomas, to be published in Proceedings of ISAF’98.
R. W. Schwartz, B. C. Bunker, D. B. Dimos, R. A. Assink, B. A. Tuttle, D. R. Tallant and I. A. Weinstock, Integrated Ferroelectrics 12, 24 (1992).
R. W. Schwartz, J. A. Voigt, B. A. Tuttle, D.A. Payne, T. L. Reichert and R. S. Da Salla, J. Mater. Res. 12, 444 (1997).
B. Malič, M. Kosec, K. Smolej and S. Stavber., to be published in Proceedings of ISAF’98.
C. Chen, D. F. Ryder and W. A. Spurgeon, J. Am. Ceram. Soc. 72, 8, 1495 (1989).
K. D. Budd, S. K. Dey and D. A. Payne, Brit. Ceram. Soc. Proc. 36, 107 (1995).
H.-W. Wang, D. A. Hall and F. R. Sale, Journal of Thermal Analysis 41, 605 (1994).
C. J. Brinker and G. W. Scherer in “Ultrasonic Processing of Ceramics, Glasses, and Composites” edited by L. L. Hench and D. R. Ulrich, John Wiley & Sons, New York (1984).
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Fè, L., Malič, B., Norga, G. et al. The Role of Precursor Chemistry in the Ferroelectric Properties of Donor Doped Pb(Zr, Ti)O3 Thin Films. MRS Online Proceedings Library 541, 369–374 (1998). https://doi.org/10.1557/PROC-541-369
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DOI: https://doi.org/10.1557/PROC-541-369