Skip to main content
SpringerLink
Log in

Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

An all-optical technique based on laser excitation and detection of surface acoustic waves is capable of precise, fast, noncontact and nondestructive measurements of metal film thickness. The technique is integrated into a compact and robust instrument. Applications to metal interconnect process control in integrated circuit technology are presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. See e.g. D. Pramanik and S. Bothra, Future Fab Intl. 1, 183 (1998).

    Google Scholar 

  2. M. Banet, M. Fuchs, R. Bélanger, J. B. Hanselman, J. A. Rogers, and K. A. Nelson, Future Fab Intl. 4, 297 (1998).

    Google Scholar 

  3. A.R. Duggal, J.A. Rogers, and K.A. Nelson, J. Appl. Phys. 72, 2823 (1992).

    Article  CAS  Google Scholar 

  4. J. A. Rogers, M. Fuchs, M.J. Banet, J. B. Hanselman, R. Logan, and K. A. Nelson, Applied Phys. Letters 71,225 (1997).

    Article  CAS  Google Scholar 

  5. M. J. Banet, M. Fuchs, J. A. Rogers, J. H. Reinhold, J. M. Knecht, M. Rothschild, R. Logan, A. A. Maznev, and K. A. Nelson, Applied Physics Letters 73,169,13 (1998).

    Google Scholar 

  6. J.A. Rogers and K.A. Nelson, IEEE Trans. Ultrason. Ferroelect.Freq. Control 42, 555 (1995).

    Article  Google Scholar 

  7. O.W. Kading, H. Skurk, A.A. Maznev, and E. Matthias, Appl. Phys. A61,253 (1995).

    Article  Google Scholar 

  8. J.A. Rogers and K.A. Nelson, J. Adhesion 50, 1 (1995).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Philips Analytical, 12 Michigan Dr., Natick, MA, 01760, USA

    A.A. Maznev, M.J. Banet, M. Gostein, R.B. Hanselman, M.A. Joffe & R. Sacco

  2. Dept. of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    K.A. Nelson

Authors
  1. A.A. Maznev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M.J. Banet
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Gostein
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. R.B. Hanselman
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M.A. Joffe
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. R. Sacco
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. K.A. Nelson
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A.A. Maznev.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Maznev, A., Banet, M., Gostein, M. et al. Precise Determination of Thin Metal Film Thickness With Laser-Induced Acoustic Grating Technique. MRS Online Proceedings Library 591, 188–193 (1999). https://doi.org/10.1557/PROC-591-195

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-591-195

Search

Navigation