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Pulsed Laser Annealing of Silicon-Germanium Films

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Abstract

In this work, we investigate the possibility of using pulsed laser annealing to locally tailor the physical properties of Si1-xGex (18% < × < 90%) prepared by low pressure chemical vapor deposition (LPCVD) at 400°C. Films which were amorphous as deposited showed, after laser annealing, strong {111} texture and a columnar grain microstructure and an average resistivity of 0.7 mΩ.cm. AFM showed that the first few laser pulses result in a noticeable reduction in surface roughness, which is proportional to the pulse energy. However, a large number of successive pulses dramatically increases the surface roughness.

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References

  1. A. Tanaka, S. Mastsumoto, N. Tsukamoto, S. Itoh, K. Chiba, T. Endoh, A. Nakazato, K. Okuyama, Y. Kumazawa, M. Hijikawa, H. Gotoh, T. Tanaka and N. Terammishi,, IEEE ED, 43 (11), 1844 (1996).

    Article  CAS  Google Scholar 

  2. M. H. Unewisse, B. I. Craige, R. J. Watson, O. Reinhold and K. C. Liddiard, SPIE 2554 (43), 43 (1995).

    CAS  Google Scholar 

  3. A. Stot, Proc. SPIE 2935, 154 (1997).

    Article  Google Scholar 

  4. K. Horner, and G. Kovacs, Sensors and Actuators A, 91 (3), 386–97 (2001).

    Article  Google Scholar 

  5. Chienliu-Chang; Ching-Liang-Dai; Jenn-Yi-Chen; Honglin-Chen; Kaihsiang-Yen; Jing-Hung-Chiou; Pei-Zen-Chang, J. of the Chinese Instit. of Engineers. 23 (6), 781–6 (2000).

    Article  Google Scholar 

  6. J. Lund, C. Jahnes, H. Deligianni, L. Paivikki, J. Cotte, P. Andricacos, D. Seeger and J. Margerlein, Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 2–6, 2002, 38–41.

    Google Scholar 

  7. A. E. Franke, D. Bilic, D. Chang, P. T. Jones, T. J. King, R. T. Howe and G. C. Johnson, Proceedings of the 1999 International Conference on Solid-State Sensors and Actuators, Transducers’99 (Sendai, Japan), 530–533, (1999).

    Google Scholar 

  8. S. Sedky, A. Witvrouw and K. Baert, Sensors and Actuators A, 97–98C, 496–504, (2002).

    Google Scholar 

  9. S. Bhave, B. Bircumshaw, W. Low, Y. Kim, A. Pisano, T. king and R. Howe, Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 2–6, 2002, 34–37.

    Google Scholar 

  10. S. Lee and S. Joo, IEEE EDL 17, 160–162 (1996).

    Article  CAS  Google Scholar 

  11. D. Toet, P. Smith and T. Sigmon, J. of Appl. Phys., 85 (11), June 1999, 7914–18.

    Article  CAS  Google Scholar 

  12. D. Murley, N. Young, M. Trainor and D. McClulloch, IEEE ED 48 (6), 1145–1151, (2001).

    Article  CAS  Google Scholar 

  13. G. Andra, J. Bergmann, F. Falk, E. Ose, Thin Solid Films, 337, 98–100 (1999).

    Article  Google Scholar 

  14. S. Sedky, P. Fiorini, M. Caymax, S. Loreti, K. Baert, L. Hermans and R. Mertens, J. of MicroElectroMechanical Systems 7(4), 365–372, (1998).

    Article  CAS  Google Scholar 

  15. Tsu-Jae King, Roger T. Howe and Sherif Sedky, Gang Liu, Blake C. -Y. Lin, Matthew Wasilik, Christoph Duenn,, IEDM 2002 (To be published).

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Authors and Affiliations

  1. Physics Department, The American University in Cairo, P.O. Box 2511, Cairo, Egypt

    Sherif Sedky

  2. Department of Materials Science & Engineering, University of California, Berkeley, USA

    Jeremy Schroeder & Timothy Sands

  3. Berkeley Sensor & Actuator Center, University of California, Berkeley, USA

    Roger Howe

  4. Department of Electrical Engineering and Computer Science, University of California, Berkeley, USA

    Roger Howe & Tsu-Jae King

Authors
  1. Sherif Sedky
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  2. Jeremy Schroeder
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  3. Timothy Sands
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  4. Roger Howe
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  5. Tsu-Jae King
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Sedky, S., Schroeder, J., Sands, T. et al. Pulsed Laser Annealing of Silicon-Germanium Films. MRS Online Proceedings Library 741, 42 (2002). https://doi.org/10.1557/PROC-741-J4.2

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  • DOI: https://doi.org/10.1557/PROC-741-J4.2

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