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Fundamentals of SiC-Based Device Processing

  • Silicon Carbide Electronic Materials and Device
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Authors
  1. M. R. Melloch
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  2. J. A. Cooper Jr.
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Melloch, M.R., Cooper, J.A. Fundamentals of SiC-Based Device Processing. MRS Bulletin 22, 42–49 (1997). https://doi.org/10.1557/S0883769400032759

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