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Ion Beam Induced Conductivity Changes in Glassy Carbon

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Abstract

Ion beam irradiation of Glassy Carbon is shown to increase its resistivity by up to eight orders of magnitude. These changes in resistivity are correlated with results obtained from Raman spectroscopy and Reflection High Energy Electron Diffraction. At high doses of C implantation there is convincing evidence that ion beam irradiation partially graphitizes the surface of Glassy Carbon.

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Authors and Affiliations

  1. Department of Applied Physics and Microelectronics and Materials Research Centre, Royal Melbourne Institute of Technology, GPO Box 2476V, Melbourne, Victoria, 3001, Australia

    D. McCulloch & S. Prawer

Authors
  1. D. McCulloch
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  2. S. Prawer
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McCulloch, D., Prawer, S. Ion Beam Induced Conductivity Changes in Glassy Carbon. MRS Online Proceedings Library 157, 825–830 (1989). https://doi.org/10.1557/PROC-157-825

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  • DOI: https://doi.org/10.1557/PROC-157-825

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