1992 Volume 100 Issue 1157 Pages 70-74
Oxidation behavior of sintered AlN by oxygen and water vapor was studied at 1400°C for the purpose of surface treatment. The partial pressure of oxygen, Po2 was controlled at 10-10 and 10kPa, and that of water vapor, PH2O was changed at 5.0×10-2 to 8.5kPa. The oxidation product detected by XRD was α-Al2O3. Oxidation rate was increased with increasing PH2O. The weight gain with time by oxygen was parabolic, and that by water vapor was linear. The Al2O3 layer formed by the oxidation of sintered AlN with oxygen was relatively dense, and coherent. The oxidation kinetics were discussed using the mixed-control rate equation on the basis of unreacted-core model.
