Formation of Si-based nanosheets by extraction of Ca from CaSi2 layers on Si substrates

Xiang MENG; Haruo IMAGAWA; Erchao MENG; Hiroaki SUZUKI; Yuya SHIRAHASHI; Kaito NAKANE; Hiroshi ITAHARA; Hirokazu TATSUOKA

doi:10.2109/jcersj2.122.618

Feature: Trend of Current Research on Ceramics in East Asia: 30^th Japan-Korea International Seminar on Ceramics: Papers

Formation of Si-based nanosheets by extraction of Ca from CaSi₂ layers on Si substrates

Xiang MENG, Haruo IMAGAWA, Erchao MENG, Hiroaki SUZUKI, Yuya SHIRAHASHI, Kaito NAKANE, Hiroshi ITAHARA, Hirokazu TATSUOKA

著者情報

キーワード: Calcium silicide, Si-based nanosheets, Chloride, Chemical vapor reaction

ジャーナルフリー

2014 年 122 巻 1428 号 p. 618-621

DOI https://doi.org/10.2109/jcersj2.122.618

詳細

抄録

It was demonstrated that flake-like structures containing Si-based nanosheets were successfully synthesized on Si(111) substrates. By exposure of CaSi₂/Si substrates to CrCl₂ vapor, Ca atoms were extracted from CaSi₂, then, the Si-based nanosheets were formed. The structural properties of the Si-based nanosheets formed at the edge of the flakes were examined. It is noted that the flake-like structures were rooted to the substrates, and that the Si-based nanosheets were easily exfoliated from the flake-like structures, to expose the surfaces corresponding to the Si{111} planes of the nanosheet, originated from the corrugated Si(111) layers linked by Ca in CaSi₂.

責任著者(Corresponding author)

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