レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
半導体多層膜分布ブラッグ反射鏡を用いる面発光レーザーの設計と製作
坂口 孝浩小山 二三夫伊賀 健一
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1990 年 18 巻 3 号 p. 137-145

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This paper presents the design considerationand fabrication of a vertical cavity surfaceemitting (SE) laser using GaAlAs/ A1As distributed Bragg reflectors (DBR). From theoretical calculation, a peak reflectivity of 99% can be expected even when we consider a reasonable loss .The deterioration of reflectivity due to thickness errors was examined. An MOCVD-grown DBRexhibited are flectivity of 97% at the wavelength of O.88 μm . The thre shold current of a 30 μmdiameter device with a simple mesa cap structure was 200 mA under the room-temperature pulsedcondition. The threshold of 40 mA was obtained by a 10 μm diameter device with a claddingetchedcurrent confinement structure.

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