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Device for Characterization of the Diffraction Pattern of Computer-Generated Holograms in a Wide Angular Range

  • Optical Information Technologies
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Optoelectronics, Instrumentation and Data Processing Aims and scope

Abstract

Results of the development and testing of a device for detecting and analyzing the diffraction pattern of computer-generated holograms are reported. It is demonstrated that this device allows characterization of the diffraction pattern of radiation reflected from the surface microrelief of the considered element or transmitted through it in the angular range of diffraction of the order of ±90° and 360° in terms of the azimuthal angle. A possibility of determining the periods, duty cycle, and angular orientation of diffraction structures and also the diffraction efficiency of all diffraction orders of the examined element is described. The device is designed for real-time monitoring of the microrelief depth and shape of computer-generated holograms in the course of their fabrication.

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References

  1. S. T. Bobrov, G. I. Greisukh, and Yu. G. Turkevich, Optics of Diffractive Elements and Systems (Mashinostroenie, Leningrad, 1986) [in Russian].

    Google Scholar 

  2. R. K. Nasyrov and A. G. Poleshchuk, “Manufacturing and Certification of a Diffraction Corrector for Controlling the Surface Shape of the Six-Meter Main Mirror of the Big Azimuthal Telescope of the Russian Academy of Sciences,” Avtometriya 53 (5), 116–123 (2017) [Optoelectron., Instrum. Data Process. 53 (5), 517–523 (2017)].

    Google Scholar 

  3. R. K. Nasyrov, A. G. Poleshchuk, M. N. Sokolskii, and V. P. Tregub, “Interferometric Method for Controlling the Assembly Quality of an Optical System with an Eccentrically Arranged Aspherical Lens,” Avtometriya 53 (5), 124–130 (2017) [Optoelectron., Instrum. Data Process. 53 (5), 524–529 (2017)].

    Google Scholar 

  4. G. A. Lenkova, “Features of Optical Surfaces of Multifocal Diffractive-Refractive Eye Lenses,” Avtometriya 53 (5), 17–29 (2017) [Optoelectron., Instrum. Data Process. 53 (5), 431–443 (2017)].

    Google Scholar 

  5. V. P. Koronkevich, A. G. Poleshchuk, A. G. Sedukhin, and G. A. Lenkova, “Laser Interferometer and Diffraction Systems,” Komp. Optika 34 (1), 4–23 (2010).

    Google Scholar 

  6. A. V. Volkov, D. L. Golovashkin, L. L. Doskolovich, et al., Methods of Computer Optics, Ed. by V. A. Soifer (Fizmatlit, Moscow, 2003) [in Russian].

  7. A. V. Volkov, “Monitoring of DOE Microrelief Parameters with the Use of Test Diffraction Structures,” Vestn. SamGTU, Ser. Fiz.-Tekhn. Nauki, No. 12, 179–185 (2001).

    Google Scholar 

  8. M. A. Golub, “Optical Performance Evaluation from Microrelief Profile Scans of Diffractive Optical Elements,” in Proc. Intern. Meeting ”Diffractive Optics and Micro-Optics”, Québec, Canada, June 18–22, 2000, Vol. 1, pp. 110–112.

    Google Scholar 

  9. V. P. Kiryanov and V. G. Nikitin, “Measurement of the Efficiency of Diffractive Optical Elements by Means of Scanning,” Avtometriya 40 (5), 82–93 (2004).

    Google Scholar 

  10. D. A. Belousov, “Device for Measuring the Diffraction Efficiency in a Broad Dynamic Range,” in Proc. All-Russian Conf. of Young Scientists “Science. Technologies. Innovations” (Novosibirsk State Technical University, Novosibirsk, 2014), Part 1, pp. 15–19.

    Google Scholar 

  11. W. Cai, P. Zhou, Ch. Zhao, and J. H. Burge, “Diffractive Optics Calibrator: Measurement of Etching Variations for Binary Computer-Generated-Holograms,” Appl. Opt. 53 (11), 2477–2486 (2014).

    Article  ADS  Google Scholar 

  12. V. N. Khomutov, A. G. Poleshchuk, and V. V. Cherkashin, “Measurement of the Diffraction Efficiency of DOEs over Many Diffraction Orders,” Komp. Optika 35 (2), 196–202 (2011).

    Google Scholar 

  13. D. A. Belousov, A. G. Poleshchuk, and V. N. Khomutov, “Monitoring of the Spatial Distribution of Optical Radiation Transmitted through and Reflected from the Diffraction Structure,” Komp. Optika 39 (6), 678–686 (2015).

    Article  ADS  Google Scholar 

  14. M. Born and E. Wolf, Principles of Optics (Pergamon Press, 1970).

    Google Scholar 

  15. Yu. A. Bystrov, E. A. Kolgin, and B. N. Kotletsov, Engineering Size Monitoring in Microelectronic Production (Radio Svyaz, Moscow, 1988) [in Russian].

    Google Scholar 

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Authors and Affiliations

  1. Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, pr. Akademika Koptyuga 1, Novosibirsk, 630090, Russia

    D. A. Belousov, A. G. Poleshchuk & V. N. Khomutov

Authors
  1. D. A. Belousov
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  2. A. G. Poleshchuk
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  3. V. N. Khomutov
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Corresponding author

Correspondence to D. A. Belousov.

Additional information

Original Russian Text © D.A. Belousov, A.G. Poleshchuk, V.N. Khomutov, 2018, published in Avtometriya, 2018, Vol. 54, No. 2, pp. 35–42.

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Belousov, D.A., Poleshchuk, A.G. & Khomutov, V.N. Device for Characterization of the Diffraction Pattern of Computer-Generated Holograms in a Wide Angular Range. Optoelectron.Instrument.Proc. 54, 139–145 (2018). https://doi.org/10.3103/S8756699018020048

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  • DOI: https://doi.org/10.3103/S8756699018020048

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