日本応用磁気学会誌
Online ISSN : 1880-4004
Print ISSN : 0285-0192
ISSN-L : 0285-0192
アクチュエータ
磁性薄膜カンチレバの駆動原理に関する一考察
本田 崇荒井 賢一
著者情報
ジャーナル オープンアクセス

1997 年 21 巻 4_2 号 p. 817-820

詳細
抄録

This paper describes a theoretical analysis of the mechanical properties of magnetic thin-film cantilevers for micro-electromechanical systems. Magnetostriction and magnetic torque were used as driving principles in this study. The magnetostriction-driven cantilever had a bimorph structure, composed of TbFe and SmFe thin films, and the torque-driven one had a metal powder (MP) thin film or a rare-earth magnet thin film. The static deflection and force produced by both cantilevers were calculated by the theory of elasticity. As a result, it was found that the conditions suitable for each driving principle depended on the ratio of thickness to length and the intensity of the applied magnetic field.

著者関連情報
© 1997 (社)日本応用磁気学会
前の記事 次の記事
feedback
Top