Stress Distribution in Silicon Subjected to Atomic Scale Grinding with a Curved Tool Path
Abstract
:1. Introduction
2. Simulation Methodology
2.1. MD Simulation Model
2.2. Simulation Theory of Stress
3. Results and Discussion
3.1. Effect of Arc Radius
3.2. Effect of Grinding Depth
3.3. Stress Distribution
3.3.1. Hydrostatic Stress
3.3.2. Von Mises Stress
3.3.3. Normal Stresses
3.3.4. Shear Stress
4. Conclusions
- (1)
- The effect of arc radii on the surface morphology and stress distribution was investigated. By comparing the surface morphologies of the cases with arc radii (0 Å, 20 Å, 40 Å and 60 Å), it was shown that arc radius plays an important role in determining cross-sectional profiles with the volume of material pileups on sides of the groove. A stress comparison indicated that the shear stress σxy declines first and then rises, while the other stresses show the opposite trend.
- (2)
- The effect of grinding depth during curve grinding is studied. For cases with grinding depths of 10 Å, 15 Å, 20 Å and 25 Å, it was shown that a larger grinding depth can improve the grinding efficiency of brittle material silicon at the atomic-scale. The average values of σhyd, σxx and σyy decreased with fluctuations as the grinding distance increased at the arc segment, while the average values of σvon and σzz were in a fluctuating state. The average value of σxy was in a state of fluctuation after an initial increase.
- (3)
- Snapshots of the stresses on the X–Y, X–Z and Y–Z planes were analyzed. Additionally, lateral snapshots of the three-dimensional stress evolution during grinding were discussed. It can be deduced from the stress distribution that the curve trajectory leads to asymmetric distribution and the concentration of stress during atomic-scale grinding.
- (4)
- Stress concentration in the material during curve grinding was examined. For σhyd, σxx, σyy and σzz, the compressive stress regions were mainly concentrated around the tool, whereas the tensile stress regions were concentrated at the rear of the tool. The peak region for σvon was not distributed around the tool, but rather, on both sides of the front region of the tool. For σxy, the left and right sides of the tool were peak regions of positive shear stress and negative shear stress, respectively.
Author Contributions
Funding
Conflicts of Interest
References
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Model | Workpiece | Tool |
---|---|---|
material | silicon | diamond |
dimension | 240 Å × 220 Å × 120 Å | side length: 20 Å |
lattice | 5.432 Å | 3.567 Å |
number of atoms | 315,414 | 10,930 |
initial temperature | 293 K | |
time step | 1 fs | |
grinding depth | 25 Å, 20 Å, 15 Å and 10 Å | |
arc radius | 0 Å, 20 Å, 40 Å, 60 Å | |
grinding velocity | 100 m/s | |
potential function | Tersoff |
R (Å) | d1 (Å) | d2 (Å) | Center Coordinate of arc (Å) |
---|---|---|---|
0 | 140 | 80 | (140, −40) |
20 | 120 | 60 | (120, −20) |
40 | 100 | 40 | (100, 0) |
60 | 80 | 20 | (80, 20) |
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Fang, X.; Kang, Q.; Ding, J.; Sun, L.; Maeda, R.; Jiang, Z. Stress Distribution in Silicon Subjected to Atomic Scale Grinding with a Curved Tool Path. Materials 2020, 13, 1710. https://doi.org/10.3390/ma13071710
Fang X, Kang Q, Ding J, Sun L, Maeda R, Jiang Z. Stress Distribution in Silicon Subjected to Atomic Scale Grinding with a Curved Tool Path. Materials. 2020; 13(7):1710. https://doi.org/10.3390/ma13071710
Chicago/Turabian StyleFang, Xudong, Qiang Kang, Jianjun Ding, Lin Sun, Ryutaro Maeda, and Zhuangde Jiang. 2020. "Stress Distribution in Silicon Subjected to Atomic Scale Grinding with a Curved Tool Path" Materials 13, no. 7: 1710. https://doi.org/10.3390/ma13071710