In a previous study, we proposed a control methodology based on a kernel-based learning method for hysteresis compensation. However, its success significantly depended on a sufficient amount of representative training data and adjustment of the optimal parameters to get an adequate approximation of piezoelectric actuator behavior. As rate-dependent hysteresis is quite sensitive to disturbance, the accurate prediction of the hysteresis behavior may not be guaranteed at increasingly strong disturbances, which can affect the overall control performance. The solution to typically used address this problem is to insert a robust feedback controller into the control loop to form a hybrid control structure capable of handling such disturbances and internal uncertainties.
For this purpose, a parallel controller structure consisting of an inverse LSSVM controller and an RST controller was proposed in this paper, as shown in
Figure 7. The input control signal for the piezoelectric actuator was generated by summing two commands: a feedforward command generated by the inverse model and feedback command generated by the RST controller. According to a previous study [
44], it was found that the use of RST in parallel with inverse feedforward control could efficiently control different nonlinear processes with more precise motion tracking than the cascade control structure. In addition, the inverse feedforward controller, based on the LSSVM model, may not guarantee accurate convergence of the output to the reference in the cascade control structure. This is because the outputs of the RST controller are given as inputs to the inverse model, whereas the inverse LSSVM model is usually trained by the desired displacement values. The RST controller is well-suited to be combined with our approach because of its simple structure, fast response, and insensitivity to disturbances [
27]. Therefore, this approach integrates the advantages of the LSSVM-based controller, which allows high modeling accuracy for piezoelectric hysteresis, and the RST controller, which helps to overcome disturbances and enhances the robustness of tracking. The details of the inverse model and RST controller are presented in the coming sections.
4.1. Inverse LSSVM Hysteresis Model
Although inverse model compensation has been widely used to control piezoelectric actuators [
45], finding the exact inverse of a hysteresis model is often challenging [
3,
46]. This is because it significantly depends on the efficiency of the algorithm of the hysteresis model and its ability to describe different types of hysteresis loops. Moreover, the algorithms that can provide accurate models may be too complicated to be implemented in real time. The advantage of the PSO-LSSVM method based on stop operators is that it exhibits high precision compared with other hysteresis modeling methods [
22,
25], and its inverse model is easy to obtain. In this study, the PSO-LSSVM algorithm was used to develop the inverse hysteresis model. The LSSVM inverse model was inversely trained with offline datasets (A, B, and C). During offline training, the output displacement was selected as the input for the LSSVM training, and the corresponding reference input as the output. After sufficient training, the LSSVM inverse model was used to produce the feedforward control signal, as shown in
Figure 8. One major limitation of the LSSVM inverse model, based on hysteresis operators, was its long execution time, which occurred due to the increase in the number of operators. To avoid this issue, the order of the stop operators was set to 55 in this study, as we recommended in a previous study [
25]. In this way, the size of the kernel matrix was reduced, decreasing the time complexity of the proposed control scheme. Such a compromise would guarantee the desired tracking speed and accuracy, allowing an additional feedback controller to be inserted into the control loop without more time complexity.
Usually, the feedforward compensator cannot eliminate the tracking error in the presence of strong disturbances. Therefore, a robust RST feedback controller was inserted into the control loop. This will be discussed in the next subsection.
4.2. RST Controller
In this study, a robust digital RST controller was combined with the feedforward controller. The RST controller usually involves the placement of a closed-loop pole with sensitivity function shaping in the frequency domain [
27]. The shaping of the sensitivity functions is achieved by suitably selecting the poles of the closed-loop system, so that the desired performances in terms of tracking, disturbance rejection, and robustness are achieved. Thus, the design of the RST controller depends on the mathematical model of the piezoelectric actuator. We assume that the discrete-time transfer function for the open-loop system to be controlled is given by:
The structure of the RST controller is shown in
Figure 9, where R, S, and T are polynomials and constitute the RST controller
K(
z), which can be computed as follows:
The above equations demonstrate that the RST controller design is considered to be an optimization problem, where the coefficients of R and S have to be optimized to match the desired regulation performance. As for the polynomial
T, it is made equal to a constant, where
T = R (1), which helps to ensure a steady state gain of unity between the reference and output to match the desired tracking performance. To reach the optimum solution, constraints relating to the desired performance and stability requirements of the piezo-actuated stage were imposed on the closed loop sensitivity functions. Such sensitivity functions had the following expressions:
where
is the output sensitivity function, which is the transfer function between the disturbance
d and the piezoelectric actuator output
y;
is the complementary sensitivity function, which is the transfer function between the reference
and the output
y; and
is the input sensitivity function, which is the transfer function between the disturbance
d and piezoelectric actuator input
u. The constraints of these functions are given below [
26]:
Constraint 1: To achieve the desired robustness, the maximum peak magnitude of needed to be less than 6 dB, . This constraint helped to ensure sufficient stability margin and achieve good robustness performance.
Constraint 2: For the same reasons that “Constraint 1” was required to be imposed, the maximum peak magnitude of needed to be less than dB, .
Constraint 3: As the gain of the amplifier in our system was 10, the maximum peak magnitude of needed to be less than 20 dB, to avoid the saturation issues of the command signal.
Constraint 4: To achieve more precise tracking control, a constraint on tracking errors was required in our design. Therefore, a maximum tracking error of 0.2% of the travel range was allowed, in the range of 0–20 Hz. This constraint could be expressed by imposing a limit on the output sensitivity function, where .
The optimum solution for this problem was reached by placing the closed-loop poles within a specified region that yielded good performance under these constraints. We assumed that the closed-loop poles should be placed at desired locations, as specified by the polynomial
P (
). This polynomial was factorized to emphasize the dominant and auxiliary poles, as follows:
where
and
define the dominant and auxiliary poles, respectively. To find the controller polynomials R and S, the following Bizout equation needed to be solved:
The polynomials
and
generally contain pre-specified fixed parts, which are
and
, respectively; thus, they were also factored as follows:
By substituting Equations (29), (31) and (32) in Equation (30), we obtain:
Therefore, the polynomials and need to be solved to design , and . The design procedures of the RST controller in this paper consist of eight steps, which can be summarized as follows:
Estimate the transfer function of the piezoelectric stage model and obtain ) and ).
Choose dominant poles and determine , and .
From Equation (33), solve and
Compute and using Equations (31) and (32), respectively.
Compute from the equation = R(1).
Compute the sensitivity functions , , and by Equations (26)–(28), respectively.
Evaluate the shaping of the sensitivity functions using the considered constraints and performance specifications.
Repeat steps 2 to 7 until the optimum solution is reached.