Abstract
The accurate measurement on the compressibility and thermal expansion coefficients of density standard liquid at 2329kg/m3 (DSL-2329) plays an important role in the quality control for silicon single crystal manufacturing. A new method is developed based on hydrostatic suspension principle in order to determine the two coefficients with high measurement accuracy. Two silicon single crystal samples with known density are immersed into a sealed vessel full of DSL-2329. The density of liquid is adjusted with varying liquid temperature and static pressure, so that the hydrostatic suspension of two silicon single crystal samples is achieved. The compression and thermal expansion coefficients are then calculated by using the data of temperature and static pressure at the suspension state. One silicon single crystal sample can be suspended at different state, as long as the liquid temperature and static pressure function linearly according to a certain mathematical relationship. A hydrostatic suspension experimental system is devised with the maximal temperature control error ±50 μK; Silicon single crystal samples can be suspended by adapting the pressure following the PID method. By using the method based on hydrostatic suspension principle, the two key coefficients can be measured at the same time, and measurement precision can be improved due to avoiding the influence of liquid surface tension. This method was further validated experimentally, where the mixture of 1, 2, 3-tribromopropane and 1,2-dibromoethane is used as DSL-2329. The compressibility and thermal expansion coefficients were measured, as 8.5×10−4 K−1 and 5.4×1010 Pa−1, respectively.
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Supported by National Natural Science Foundation of China(Grant No. 51105347), and National Key Technology R&D Program of Ministry of Science and Technology of China(Grant No. 2011BAI02B03)
WANG Jintao, born in 1976, is currently an assistant research fellow at National Institute of Metrology, China. He received his PhD degree from Xi’an Jiaotong University, China, in 2006. His research interests include precise measurement on density and volume for liquid and solid.
LIU Ziyong, born in 1955, is currently a senior engineer at National Institute of Metrology, China. He received his bachelor degree on physics in Shanxi University, China, in 1978.
XU Changhong, born in 1978, is currently an assistant research associate at National Institute of Metrology, China. She received her master degree on physics in National Institute of Metrology, China, in 2006.
LI Zhanhong, born in 1974, is currently an assistant research associate at National Institute of Metrology, China. He received his master degree on instrument in Beijing Institute of Technology, China, in 2000.
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Wang, J., Liu, Z., Xu, C. et al. Measurement method of compressibility and thermal expansion coefficients for density standard liquid at 2329 kg/m3 based on hydrostatic suspension principle. Chin. J. Mech. Eng. 27, 779–784 (2014). https://doi.org/10.3901/CJME.2014.0422.080
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DOI: https://doi.org/10.3901/CJME.2014.0422.080