Abstract
We investigated the effects of the post-annealing treatment (PAT) on the properties of Ga-doped tin-oxide (Ga-SnOx) thin films grown at room temperature by using a radio-frequency magnetron sputtering technique. On the basis of X-ray photoelectron spectroscopy (XPS), dynamic secondaryion mass spectrometry, X-ray diffraction (XRD), and Hall Effect measurements, we conclude that n-type SnO2 is the dominant phase in all samples regardless of PAT at low temperatures (25–200 °C). The Sn2+ area decreased to 32.5% with increasing temperature up to 150 °C, with a simultaneous increase in the Sn4+ area to 59%. This was attributed to a decrease and an increase in the Ga and the oxygen contents in the samples, respectively, which also caused a decrease in the number of oxygen vacancies in the samples treated at higher temperatures. In contrast, XPS on the samples post-annealed at temperatures higher than 150 °C showed results opposite to those of the samples treated at temperatures lower than 150 °C. This indicates that the Ga ions in Ga-doped SnOx films act as hole acceptors and that heat treatment is useful for controlling the number of oxygen vacancies, Sn2+ ions, and Sn4+ ions in Ga-doped SnOx films. In addition, XRD showed that post-annealing did not affect the amorphous phase in the samples.
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References
E. Fortunato, P. Barquinha and R. Martins, Adv. Mater. 24, 2945 (2012).
L. Guo et al., Mater. Sci. Semicond. Process. 46, 35 (2016).
L. Qiang et al., Solid-State Electron. 129, 163 (2017).
J-H. Lee et al., IEEE Electron Dev. Lett. 37, 300 (2016).
A. Azmi et al., IEEE Electron Dev. Lett. 38, 1543 (2017).
P-C. Chen et al., J. Alloys Compd. 707, 162 (2017).
H. Luo, L. Liang and H. Cao, Solid-State Electron. 129, 88 (2017).
J. S. Ahn, R. Pode and K. B. Lee, Thin Solid Films 608, 102 (2016).
Y. Ogo et al., Appl. Phys. Lett. 93, 032113 (2008).
L. Y. Liang et al., J. Electrochem. Soc. 157, H598 (2010).
J. Um, B. M. Roh, S. Kimand S. E. Kim, Mater. Sci. Semicond. Process. 16, 1679 (2013).
P. C. Hsu et al., Jpn. J. Appl. Phys. 52, 05DC07 (2013).
P. C. Hsu et al., Thin Solid Films 555, 57 (2014).
S-S. Lin, Y-S. Tsai and K-R. Bai, Appl. Surf. Sci. 380, 203 (2016).
S-S. Lin, S-Y. Fan and Y-S. Tsai, Ceram. Int. 43, 1802 (2017).
H-J. Kim et al., IEEE Electron Dev. Lett. 38, 473 (2017).
A. H-T. Nguyen et al., Thin Solid Films 641, 24 (2017).
J. Yang et al., IEEE Trans. Electron Devices 63, 1904 (2016).
B. L. Zhu et al., J. Alloys Compd. 719, 429 (2017).
M. S. Huh et al., Electrochem. Solid-State Lett. 12, H385 (2009).
X. Zhang et al., Superlattices Microstruct. 123, 330 (2018).
W-S. Kim et al., Thin Solid Films 520, 2220 (2012).
B. L. Zhu et al., Ceram. Int. 43, 10288 (2017).
S. S. Pan et al., Appl. Phys. Lett. 95, 222112 (2009).
Y. Kim et al., Mater. Sci. Eng. B 177, 1470 (2012).
Y. Kim, J. Um, S. Kim and S. E. Kim, ECS Solid State Letters 1, P29 (2012).
H. P. Dang, Q. H. Luc, V. H. Le and T. Le, J. Alloys Compd. 687, 1012 (2016).
C. Z. Chen et al., Results Phys. 7, 2588 (2017).
H. I. Bang, H. B. Seo, B. S. Bae and E-J. Yun, Phys. Status Solidi A 216, 1800863 (2019).
A. Ammari, M. Trari, B. Bellal and N. Zebbar, J. Electroanal. Chem. 823, 638 (2018).
E. Elangovan and K. Ramamurthi, Cryst. Res. Technol. 38, 779 (2003).
A. Ammari, M. Trari and N. Zebbar, Mater. Sci. Semicond. Proc. 89, 97 (2019).
C. Luan, Z. Zhu, W. Miand J. Ma, J. Alloys Compd. 586, 426 (2014).
K. Liand D. Xue, J. Phys. Chem. A 110, 11332 (2006).
W. M. Haynes, CRC Handbook of Chemistry and Physics (CRC Press, Boca Raton, 2011).
D. R. Lide, CRC Handbook of Chemistry and Physics (CRC Press, Boca Raton, 2009).
V. Y. Prokhorenko et al., HighTemp. 38, 954 (2000).
P. Heitjans and J. Kärger, Diffusion in Condensed Matter: Methods, Materials, Models (Springer, Birkhauser, 2005).
D. M. Priyadarshini, R. Mannam, M. S. R. Rao and N. DasGupta, Appl. Surf. Sci. 418, 414 (2017).
H. Luo et al., ACS Appl. Mater. Interf. 7, 17023 (2015).
C-H. Hung et al., Mater. Sci. Semicond. Process. 67, 84 (2017).
H. Xie et al., Mater. Sci. Semicond. Process. 64, 1 (2017).
H. P. Dang, Q. H. Luc, T. T. Nguyen and T. Le, J. Alloys Compd. 776, 276 (2019).
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This study was supported by the Academic Research Fund of Hoseo University in 2018 (20180341).
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Bang, H.I., Yun, EJ. & Bae, B.S. Effects of the Post-Annealing Treatment on the Properties of Ga-Doped SnOx Thin Films. J. Korean Phys. Soc. 75, 561–568 (2019). https://doi.org/10.3938/jkps.75.561
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DOI: https://doi.org/10.3938/jkps.75.561