Tunable Performance of P-Type Cu2O/SnO Bilayer Thin Film Transistors

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Abstract:

Novel tunable p-type thin film transistors (TFTs) were developed by adopting Cu2O/SnO bilayer channel scheme. Using Cu2O film produced at a relative oxygen partial pressure Opp of 10% - as an upper layer - and 3% Opp SnO films - as lower layers - we built a matrix of bottom gate Cu2O/SnO bilayer TFTs with different thicknesses. We found that the thickness of the Cu2O layer plays a major role in the oxidization process exerted onto the SnO layer underneath. The thicker the Cu2O layer the more the underlying SnO layer is oxidized, and hence, the more the transistor mobility is enhanced at a certain temperature. Both the device performance and the required annealing temperature could then be tuned by controlling the thickness of each layer of the Cu2O/SnO bilayer TFT.

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260-263

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October 2014

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[1] Fortunato, E., P. Barquinha, and R. Martins, Oxide semiconductor thin-film transistors: a review of recent advances. Adv. Mater., 2012. 24(22): pp.2945-2986.

DOI: 10.1002/adma.201103228

Google Scholar

[2] Ogo, Y., et al., p-channel thin-film transistor using p-type oxide semiconductor, SnO. Appl. Phys. Lett., 2008. 93(3): pp.032113-3.

DOI: 10.1063/1.2964197

Google Scholar

[3] Yabuta, H., et al., Sputtering formation of p-type SnO thin-film transistors on glass toward oxide complimentary circuits. Appl. Phys. Lett., 2010. 97(7): pp.072111-3.

DOI: 10.1063/1.3478213

Google Scholar

[4] Martins, R., et al., P-type oxide-based thin film transistors produced at low temperatures. Proc. of SPIE 2012. 8263: pp.826315-15.

Google Scholar

[5] Caraveo-Frescas, J.A., et al., Record Mobility in Transparent p-type Tin Monoxide Films and Devices by Phase Engineering. ACS Nano, 2013. 7 (6): pp.5160-5167.

DOI: 10.1021/nn400852r

Google Scholar

[6] Al-Jawhari, H.A., et al., P-type Cu2O/SnO bilayer thin film transistors processed at low temperatures. ASC Appl. Mater. Interfaces, 2013. 5(19): pp.9615-9619.

DOI: 10.1021/am402542j

Google Scholar

[7] Barreca, D., A. Gasparotto, and E. Tondello, CVD Cu2O and CuO Nanosystems Characterized by XPS. Surf. Sci. Spect., 2007. 14(1): pp.41-52.

DOI: 10.1116/11.20080701

Google Scholar

[8] Poulston, S., et al., Surface Oxidation and Reduction of CuO and Cu2O Studied Using XPS and XAES. Surf. Interface Anal. , 1996. 24(12): p.811–820.

DOI: 10.1002/(sici)1096-9918(199611)24:12<811::aid-sia191>3.0.co;2-z

Google Scholar

[9] Pan, X.Q. and L. Fu, Oxidation and phase transitions of epitaxial tin oxide thin films on (1̄012) sapphire. J. Appl. Phys., 2001. 89(11): pp.6048-6055.

DOI: 10.1063/1.1368865

Google Scholar