Controlled Growth of Bulk 15R-SiC Single Crystals by the Modified Lely Method
p.111
p.111
Crystal Growth of 15R-SiC Boules by Sublimation Method
p.115
p.115
Growth of 3C SiC Single Crystals from Convection Dominated Melts
p.119
p.119
An Overview of SiC Growth
p.125
p.125
Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HTCVD Crystal Growth Developments
p.131
p.131
Morphology Control for Growth of Thick Epitaxial 4H SiC Layers
p.137
p.137
Vertical Hot-Wall Type CVD for SiC Growth
p.141
p.141
LPCVD Growth and Structural Properties of 4H-SiC Epitaxial Layers
p.145
p.145
3-D Computational Modeling of SiC Epitaxial Growth in a Hot Wall Reactor
p.149
p.149
Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HTCVD Crystal Growth Developments
Abstract:
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Info:
Periodical:
Materials Science Forum (Volumes 338-342)
Pages:
131-136
Citation:
Online since:
May 2000
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