[1]
J. Akedo and M. Lebedev: Recent Res. Develp. Mat. Sci., 2 (Research Signpost, India 2001) p.51. Si mirror PZT� thick layer for monmorpgh actuator Journal Title and Volume Number (to be inserted by the publisher).
Google Scholar
[2]
J. Akedo and M. Kiyohara : J. Soc. Powder Tech., Jpn., Vol. 40 (3), (2003) p.192.
Google Scholar
[3]
J. Akedo and M. Lebedev : Jpn. J. Appl. Phys., Vol. 38, (1999) p.5397.
Google Scholar
[4]
J. Akedo and M. Lebedev: Jpn. J. Appl. Phys., Vol. 40, (2001) p.5528.
Google Scholar
[5]
J. Akedo and M. Lebedev : Jpn. J. Appl. Phys., Vol. 41, (2002) p.6980.
Google Scholar
[6]
J. Akedo, M. Lebedev, A. Iwata, H. Ogiso and S. Nakano : Proc. MRS, (in printing).
Google Scholar
[7]
M. Levedev, J. Akedo, K. Mori and T. Eiju : J. Vac. Sci. & Tech. A, Vol. 18, (2000) p.563.
Google Scholar
[8]
T. J. Holmquist, G. R. Johnson, D. E. Grady, C. M. Lopatin and E. S. Hertel : Proc. 15th Int. Symp. On Ballistics, TB31, Jerusalem, Israel, 21-24 May, (1995) p.237.
Google Scholar
[9]
T. Vreeland, Jr., K. L. Montilla and A. H. Mutz : J. Appl. Phys., Vol. 82, (1997) p.2840.
Google Scholar
[10]
R.C. Dykhuizen et al.: J. of Thermal Spray Technology, Vol. 8, (1999) p.559.
Google Scholar
[11]
T. Ide, Y. Mori, I. Konda, N. Ikawa and H. Yagi, J. Jpn. Soc. Prec. Eng. Vol. 57, (1991) p.143.
Google Scholar
[12]
Rao, N. et al., J. Aerosol Sci., Vol. 29, (1998) p.707.
Google Scholar
[13]
C. Hayashi, S. Kashu, M. Oda and F. Naruse, Mater. Sci. Eng. A, Vol. 163, (1993) p.157.
Google Scholar
[14]
E. Barborini, P. Piseri, A. Podesta and P. Milani : Appl. Phys. Lett., Vol. 77, (2000) p.1059.
DOI: 10.1063/1.1289040
Google Scholar
[15]
P. Muralt et al.: Sens. & Actuators A, Vol. 48, (1995) p.157.
Google Scholar
[16]
S. Akamina et al.: Sens. & Actuators A, Vol. 21-23, (1990) p.964.
Google Scholar
[17]
T. Massood, ed., MICROACTUATORS, (Kluwer Academic Publishers, 1998).
Google Scholar
[18]
A. Manz, N. Graber and H.M. Widmer, Sens. & Actuators B, Vol. 1, (1990) p.244. ; P. Bergveld, Proc. Micro Total Analysis Systems Workshop µ-TAS’94, (1994) p.1.
Google Scholar
[19]
R.B. Evans, J.S. Griesbach and W.C. Messner, IEEE Trans. Mag., Vol. 35-2, (1999) p.977.
Google Scholar
[20]
N. Asai et al.: Proc. of IEEE Micro Electro Mech. Systems, Kyoto, Japan (2003) p.247.
Google Scholar
