Electrical Characterisation of 4H-SiC Epitaxial Samples Treated by Hydrogen or Helium
p.347
p.347
Electric-Field Screening Effects in the Micro-Photoluminescence Spectra of As-Grown Stacking Faults in 4H-SiC
p.351
p.351
EPR, ESE and Pulsed ENDOR Study of Nitrogen Related Centers in 4H-SiC Wafers Grown by Different Technologies
p.355
p.355
Excess Carrier Lifetimes in a Bulk p-Type SiC Wafer Measured by the Microwave Photoconductivity Decay Method
p.359
p.359
FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS
p.363
p.363
Impurity Conduction in Silicon Carbide
p.367
p.367
Influence of Cooling Rate after High Temperature Annealing on Deep Levels in High-Purity Semi-Insulating 4H-SiC
p.371
p.371
Investigation of Charge Carrier Lifetime Temperature-Dependence in 4H-SiC Diodes
p.375
p.375
Mechanisms of Decrease in Hole Concentration in Al-Doped 4H-SiC by Irradiation of 200 keV Electrons
p.379
p.379
FTIR Ellipsometry Analysis of the Internal Stress in SiC/Si MEMS
Abstract:
The resonant frequencies and quality factors of MEMS and NEMS depend critically on the layer quality and the residual stress in the SiC/Si heterostructure. It is demonstrated, that FTIRellipsometry is a suitable technique for monitoring the inhomogeneous residual stress inside SiC/Si heterostructures containing thin layers and their variation with during processing.
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Info:
Periodical:
Materials Science Forum (Volumes 556-557)
Pages:
363-366
Citation:
Online since:
September 2007
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