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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Influence of Nitrogen on Dislocation Mobility in...

Influence of Nitrogen on Dislocation Mobility in Czochralski Silicon

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

465-472

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.465

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Online since:

September 2003

Authors:

Valeri I. Orlov, Yu.L. Iunin, M. Badylevich, O. Lysytskiy, Hans Richter

Keywords:

300 mm Silicon, Dislocation Mobility, Nitrogen Doping

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