Production of DLC with ion beam deposition and pulsed laser deposition

Diamond-Like Carbon (DLC) resistive layers are a key ingredient for increasing the rate capabilities of Micro-Pattern Gaseous Detectors (MPGDs). Their production method and related quality is studied by ion beam deposition and pulsed laser deposition. The current DLC sample size will be scaled up gradually to 10×10 cm², their quality is assessed for the production of detector-grade amplification structures.