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Fabrication and characteristics of photofunctional polymer waveguide-type UV sensor

광기능성 폴리머 도파로형 자외선 센서의 제작 및 특성

  • Kim, Kyu-Jin (Department of Electric Engineering, Kyungpook National University) ;
  • Jang, Su-Won (Department of Electric Engineering, Kyungpook National University) ;
  • Kang, Byoung-Ho (Department of Electric Engineering, Kyungpook National University) ;
  • Kim, Do-Eok (Department of Electric Engineering, Kyungpook National University) ;
  • Kwon, Dae-Hyuk (School of Electronic and Information Engineering, Kyungil University) ;
  • Kim, Sung-Hoon (School of Dyeing and Finishing, Kyungpook National University) ;
  • Lee, Yong-Hyun (School of Electronic and Electrical Engineering, Kyungpook National University) ;
  • Kang, Shin-Won (School of Electronic and Electrical Engineering, Kyungpook National University)
  • 김규진 (경북대학교 대학원 전자공학과) ;
  • 장수원 (경북대학교 대학원 전자공학과) ;
  • 강병호 (경북대학교 대학원 전자공학과) ;
  • 김도억 (경북대학교 대학원 전자공학과) ;
  • 권대혁 (경일대학교 전자정보통신공학부) ;
  • 김성훈 (경북대학교 섬유시스템공학과) ;
  • 이용현 (경북대학교 전자전기공학부) ;
  • 강신원 (경북대학교 전자전기공학부)
  • Published : 2006.07.30

Abstract

Single-mode planar waveguide type UV sensor was fabricated using SU-8 and photochromic dye. Polymer waveguide was fabricated $10{\mu}m$ width and $2{\mu}m$ thickness for single-mode operation. The UV sensor had an absorbance with $0.0396{\sim}0.114$ absorbance/mW respectively when the 5 mm sensing area was irradiated with UV for 3 sec. And sensor had a linear properties by sensing area variation. Proposed single-mode sensor had more excellent properties of UV sensitivity than other UV sensors.

Keywords

References

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