Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Microstructural and Mechanical Characteristics of TiZrAlN Nanocomposite Thin Films by CFUBMS

CFUBMS을 이용한 TiZrAlN 나노복합 박막의 미세 구조와 기계적 특성

  • Kim, Youn-J. (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Lee, Ho-Y. (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Kim, Yong-M. (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Kim, Kab-S. (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University) ;
  • Han, Jeon-G. (Center for Advanced Plasma Surface Technology, School of Advanced Materials Science and Engineering, Sungkyunkwan University)
  • 김연준 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 이호영 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 김용모 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 김갑석 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 한전건 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터)
  • Published : 2007.02.28
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Abstract

Quaternary TiZrAlN nanocomposite thin films were synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS), and their microstructure and mechanical characteristics were examined. The grain refinement of the TiZrAlN nanocomposite thin films was controlled by adjusting the $N_2$ partial pressure. The hardness of the film varied with the $N_2$ partial pressure and the maximum value was obtained approximately 47 GPa. It was also confirmed that there is a critical value of the grain size($d_c$) to need maximum hardness.

Keywords

References

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