Recrystallization of Silicon-on-Insulator Structures by an Electron-Beam with Fast Sinusoidal X- and Slow Linear Y-Scans
H. Ishiwara1, M. Nakano1, H. Yamamoto1 and S. Furukawa1
Copyright (c) 1983 The Japan Society of Applied Physics
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Citation H. Ishiwara et al 1983 Jpn. J. Appl. Phys. 22 607
DOI 10.7567/JJAPS.22S1.607
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