Recrystallization of Silicon-on-Insulator Structures by an Electron-Beam with Fast Sinusoidal X- and Slow Linear Y-Scans

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Copyright (c) 1983 The Japan Society of Applied Physics
, , Citation H. Ishiwara et al 1983 Jpn. J. Appl. Phys. 22 607 DOI 10.7567/JJAPS.22S1.607

1347-4065/22/S1/607

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