Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
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Adhesion Characteristics between Stamp and Polymer Materials Used in Thermal Nanoimprint Lithography

열 나노임프린트 리소그래피에서 사용되는 스탬프와 폴리머 재료 사이의 점착 특성

  • Kim Kwang-Seop (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology(KAIST)) ;
  • Kang Ji-Hoon (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology(KAIST)) ;
  • Kim Kyung-Woong (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology(KAIST))
  • 김광섭 (한국과학기술원 기계공학과) ;
  • 강지훈 (한국과학기술원 기계공학과) ;
  • 김경웅 (한국과학기술원 기계공학과)
  • Published : 2006.08.01
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Abstract

In this paper, the adhesion characteristics between a fused silica without or with an anti-sticking layer and a thermoplastic polymer film used in thermal NIL were investigated experimentally in order to identify the release performance of the anti-sticking layer. The anti-sticking layers were derived from fluoroalkylsilanes, (1H, 1 H, 2H, 2H-perfluorooctyl)trichlorosilane ($F_{13}-OTS$) and (3, 3, 3-trifluoropropyl)trichlorosilane (FPTS), and coated on the silica surface in vapor phase. The commercial polymers, mr-I 7020 and 8020 (micro resist technology, GmbH), for thermal NIL were spin-coated on Si substrate with a rectangular island which was fabricated by conventional microfabrication process to achieve small contact area and easy alignment of flat contact sur- faces. Experimental conditions were similar to the process conditions of thermal NIL. When the polymer film on the island was separated from the silica surface after imprint process, the adhesion force between the silica surface and the polymer film was measured and the surfaces of the silica and the polymer film after the separation were observed. As a result, the anti-sticking layers remarkably reduced the adhesion force and the surface damage of polymer film and the chain length of silane affects the adhesion characteristics. The anti-sticking layers derived from FPTS and $F_{13}-OTS$ reduced the adhesion force per unit area to 38% and 16% of the silica sur-faces without an anti-sticking layer, respectively. The anti-sticking layer derived from $F_{13}-OTS$ was more effective to reduce the adhesion, while both of the anti-sticking layers prevented the surface damages of the polymer film. Finally, it is also found that the adhesion characteristics of mr-I 7020 and mr-I 8020 polymer films were similar with each other.

Keywords

References

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